m2c 3D SPM calibration technology provides improved measurement accuracy and has the following advantages:
- One Step: Simultaneous lateral and vertical calibration is provided in one measurement step
- One Model: For the first time, determination of coupling between vertical and lateral axes is possible
- One Click: Calibration is extremely efficient and accurate due to advanced image processing methods
- One Reference: Universal application with one reference structure is possible (SPM, CLSM, SEM or other)
m2c 3D SPM calibration structures are available for several scan areas, from 20 μm x 20 μm and up to 80 μm x 80 μm. The complete structure with four pyramidal elements (full area) or a single pyramidal element (quarter area) may be used for the automated calibration process.