3D Calibration (3 products in this category)

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3D Kalibriertechnologie für Rasterkraftmikroskopie

3D calibration structures for SPM

m2c 3D SPM calibration technology provides improved measurement accuracy and has the following advantages:

  • One Step: Simultaneous lateral and vertical calibration is provided in one measurement step
  • One Model: For the first time, determination of coupling between vertical and lateral axes is possible
  • One Click: Calibration is extremely efficient and accurate due to advanced image processing methods
  • One Reference: Universal application with one reference structure is possible (SPM, CLSM, SEM or other)

m2c 3D SPM calibration structures are available for several scan areas, from 20 μm x 20 μm and up to 80 μm x 80 μm. The complete structure with four pyramidal elements (full area) or a single pyramidal element (quarter area) may be used for the automated calibration process.

3D Kalibriertechnologie für 4Q BSD REM

3D calibration structures for 4Q BSD SEM

m2c 3D calibration technology helps to turn a SEM with 4 Quadrant BSE detectors (4Q BSD) into a quantitative measurement system. 3D calibration with special m2c reference structures for 4Q BSD SEMs has the following advantages:

  • Simultaneous (one-step) lateral and vertical calibration
  • Calibration is extremely efficient and accurate due to advanced image processing methods
  • Calibration structure has a spherical segment for the signal adjustment of the four backscatter detectors (BSD)

m2c 3D calibration structures for 4Q BSD SEM systems are available for several scan areas, from 40 μm x 40 μm and up to 80 μm x 80 μm. The complete structure with four elements (full area) or a single pyramidal element (quarter area) may be used for the automated calibration process

microCal Software

microCal - 3D Calibration and data correction software

Sku: microCal

m2c calibration software microCal is recommended for a successful 3D calibration. It is developed especially for an automated and easy 3D calibration with m2c calibration structures. By using a marker based calibration technology, it provides improved measurement accuracy and has the following advantages:

  • One Step: Simultaneous processing of lateral and vertical calibration parameters (scale, shear)
  • One Model: For the first time, determination of coupling between vertical and lateral axes is possible
  • One Click: Due to advanced image processing and statistical methods, calibration is extremely efficient and accurate
  • One Reference: Software and calibration structures are suitable for different measurement devices